Multilayer Integrated Film Bulk Acoustic Resonators
About this ebook
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
About the author
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology. He received his PhD in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and processing of carbon nanotubes, Si nanowires and SiC nanowhiskers, and nanodevices. He has 50 patents and has published 3 books and over 260 papers. He received the National Natural Science Award of China in 2005, and has held more than 20 invited talks at international conferences or institutions. He has also served on the organizing committee for 2 Journals.
Dr. Da Chen was a Ph.D. student in Prof. Yafei Zhang’s research group.
