Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers

Name: Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
Rating: 5 (2 reviews)

Denise Reichel

2016年1月 · Springer

5.0

2条评价

电子书

112

页

评分和评价未经验证了解详情

关于此电子书

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

评分和评价

5.0

2条评价

作者简介

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.