Laser-Assisted Microtechnology
Simeon M. Metev · Vadim P. Veiko
Mar 2013 · Springer Series in Materials Science Book 19 · Springer Science & Business Media
eBook
240
Pages
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About this eBook
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
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