Handbook of Quality Integrated Circuit Manufacturing
Robert Zorich
dek, 2012 · Academic Press
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Here is a comprehensive practical guide to entire wafer fabrication process from A to Z. Written by a practicing process engineer with years of experience, this book provides a thorough introduction to the complex field of IC manufacturing, including wafer area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems: How to detect them, how to confirm them, and how to solve them. Whether you are a new enginner or technician just entering the field, a fabrication manager looking for ways to improve quality and production, or someone who would just like to know more about IC manufacturing, this is the book you're looking for. - Provides a readable, practical overview of the entire wafer fabrication process for new engineers and those just entering this complex field - Enables engineers and managers to improve production, raise quality levels, and solve problems that commonly occur in the fabrication process - Presents the latest techniques and gives special attention to Japanese IC manufacturing techniques, showing how they obtain outstanding quality
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