Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Eric Garfunkel · Evgeni Gusev · Alexander Vul'
Dec 2012 · NATO Science Partnership Subseries: 3 Book 47 · Springer Science & Business Media
Ebook
507
Pages
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About this ebook
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
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